Advances in Femtosecond Laser Fabrication of Microchannels
Major progresses in mechanism investigations and methodology developments in femtosecond laser fabrication of microchannels are reviewed, especially for femtosecond laser irradiation followed by chemical etching and liquid-assisted femtosecond laser drilling. In addition, key challenges and possible future research trends are briefly discussed.
H. Tsai et al., "Advances in Femtosecond Laser Fabrication of Microchannels," Beijing Ligong Daxue Xuebao/Transaction of Beijing Institute of Technology, Beijing Institute of Technology, Jan 2012.
Mechanical and Aerospace Engineering
Keywords and Phrases
Femtosecond Laser; Microchannel; Modification
Article - Journal
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