Title

Advances in Femtosecond Laser Fabrication of Microchannels

Abstract

Major progresses in mechanism investigations and methodology developments in femtosecond laser fabrication of microchannels are reviewed, especially for femtosecond laser irradiation followed by chemical etching and liquid-assisted femtosecond laser drilling. In addition, key challenges and possible future research trends are briefly discussed.

Department(s)

Mechanical and Aerospace Engineering

Keywords and Phrases

Femtosecond Laser; Microchannel; Modification

Document Type

Article - Journal

Document Version

Citation

File Type

text

Language(s)

English

Rights

© 2012 Beijing Institute of Technology, All rights reserved.

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