Abstract

We present the integrated chip-scale tuning of multiple photonic crystal cavities. The optimized implementation allows effective and precise tuning of multiple cavity resonances (up to ~1.60 nm/mW) and intercavity phase (~0.038 π/mW) by direct local temperature tuning on suspended silicon nanomembranes. Through designing the serpentine metal electrodes and careful electron-beam alignment to avoid cavity mode overlap, the coupled photonic crystal L3 cavities preserve their high quality factors. The deterministic resonance and phase control enables switching between the all-optical analog of electromagnetically-induced-transparency to flat-top filter lineshapes, with future applications of trapping photons and optoelectronic modulators.

Department(s)

Mechanical and Aerospace Engineering

International Standard Serial Number (ISSN)

0003-6951

Document Type

Article - Journal

Document Version

Final Version

File Type

text

Language(s)

English

Rights

© 2011 American Institute of Physics (AIP), All rights reserved.

Publication Date

01 Mar 2011

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