Title

Transparent Interconnections Formed by Rapid Single-Step Fabrication of Graphene Patterns

Abstract

We developed a process to form transparent interconnections using graphenepatterns that were synthesized by laser chemical vapor deposition. the number of graphene layers was tightly controlled by laser scan speed. Graphenepatterns were fabricated at a high scan speed of up to 200 µm/s with a single-step process. the process time is about a million times faster than the conventional chemical vapor deposition method. the fabricated graphenepatterns on nickel foils were directly transferred to desired positions on patternedelectrodes. the position-controlled transfer with rapid single-step fabrication of graphenepatterns provides an innovative pathway for graphene-based interconnections.

Department(s)

Mechanical and Aerospace Engineering

Keywords and Phrases

Graphene; Nickel; Electrodes; Interconnects; Chemical Vapor Deposition; Surface Patterning; Gold; Laser Beams; Multilayers; Vacuum Chambers

Document Type

Article - Journal

Document Version

Citation

File Type

text

Language(s)

English

Rights

© 2011 Applied Physics Letters, All rights reserved.

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