Transparent Interconnections Formed by Rapid Single-Step Fabrication of Graphene Patterns
We developed a process to form transparent interconnections using graphenepatterns that were synthesized by laser chemical vapor deposition. the number of graphene layers was tightly controlled by laser scan speed. Graphenepatterns were fabricated at a high scan speed of up to 200 µm/s with a single-step process. the process time is about a million times faster than the conventional chemical vapor deposition method. the fabricated graphenepatterns on nickel foils were directly transferred to desired positions on patternedelectrodes. the position-controlled transfer with rapid single-step fabrication of graphenepatterns provides an innovative pathway for graphene-based interconnections.
J. Park and W. Xiong and Z. Q. Xie and Y. Gao and M. Qian and M. Mitchell and M. Mahjouri-Samani and Y. Zhou and L. Jiang and Y. Lu, "Transparent Interconnections Formed by Rapid Single-Step Fabrication of Graphene Patterns," Applied Physics Letters, Applied Physics Letters, Jan 2011.
The definitive version is available at http://dx.doi.org/10.1063/1.3622660
Mechanical and Aerospace Engineering
Keywords and Phrases
Graphene; Nickel; Electrodes; Interconnects; Chemical Vapor Deposition; Surface Patterning; Gold; Laser Beams; Multilayers; Vacuum Chambers
Article - Journal
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