Force Modeling and Control of SiC Monocrystal Wafer Processing

Department(s)

Mechanical and Aerospace Engineering

International Standard Serial Number (ISSN)

1087-1357

Document Type

Article - Journal

Document Version

Citation

File Type

text

Language(s)

English

Rights

© 2015 American Society of Mechanical Engineers (ASME), All rights reserved.

Publication Date

01 Dec 2015

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