Aerosol-assisted chemical vapor deposition using the b-diketonate precursors Sr(tmhd)2•2H2O, Fe(tmhd)3 and Co(tmhd)3 was investigated for depositing thin films of the mixed-conducting ceramic SrCoyFe1-yO3-d onto porous a-Al2O3 substrates. Single-phase SrCoyFe1-yO3-d perovskite films were obtained at a deposition temperature of 550°C and pressure of 15 mm Hg, whereas deposition at atmospheric pressure produced mixed-phase films. The Co/Fe elemental ratios in the films reflected those in the precursor solution, but the films were depleted in Sr. Reduced-pressure deposition provided a more uniform film morphology than atmospheric-pressure, and led to a supported film which was leak-tight to N2 flow.
C. Xia et al., "Metal-organic Chemical Vapor Deposition of Sr-Co-Fe-O Films on Porous Substrates," Journal of Materials Research, Materials Research Society, Jan 1998.
The definitive version is available at http://dx.doi.org/10.1557/JMR.1998.0023
Mechanical and Aerospace Engineering
Lockheed Martin Corporation
United States. Department of Energy
Keywords and Phrases
Ceramics; Chemical Vapor Deposition (CVD); Thin Film
Article - Journal
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