Abstract

Aerosol-assisted chemical vapor deposition using the b-diketonate precursors Sr(tmhd)2•2H2O, Fe(tmhd)3 and Co(tmhd)3 was investigated for depositing thin films of the mixed-conducting ceramic SrCoyFe1-yO3-d onto porous a-Al2O3 substrates. Single-phase SrCoyFe1-yO3-d perovskite films were obtained at a deposition temperature of 550°C and pressure of 15 mm Hg, whereas deposition at atmospheric pressure produced mixed-phase films. The Co/Fe elemental ratios in the films reflected those in the precursor solution, but the films were depleted in Sr. Reduced-pressure deposition provided a more uniform film morphology than atmospheric-pressure, and led to a supported film which was leak-tight to N2 flow.

Department(s)

Mechanical and Aerospace Engineering

Sponsor(s)

Lockheed Martin Corporation
Sandia Laboratories
United States. Department of Energy

Keywords and Phrases

Ceramics; Chemical Vapor Deposition (CVD); Thin Film

Document Type

Article - Journal

Document Version

Final Version

File Type

text

Language(s)

English

Rights

© 1998 Materials Research Society, All rights reserved.

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