We have evaluated lanthanum strontium cobalt oxide (La0.50Sr0.50CoOx; LSCO 50/50) as a candidate “transparent” electrode for use in an electrostatic shutter-based infrared sensor protection device. The device requires that the electrode be transparent (80% transmission) and have moderate sheet resistance (300 - 500 Ω/sq.). To meet these needs, the effects of postdeposition annealing on the resistivity and optical absorption characteristics of sputter deposited LSCO thin films were studied. The as-deposited films were characterized by an absorption coefficient of ~ 12,500 cm-1 and resistivities of ~ 0.08 to 0.5 Ω-cm. With annealing at 800°C, the resistivity decreased to 350 μΩ-cm, while the absorption coefficient increased to ~ 155,000 cm-1. By using a post-deposition annealing step at 800°C and controlling film thickness, it appears that a standard LSCO 50/50 material may possess the requisite conductivity and optical transmission properties for this sensor protection device.
R. W. Schwartz and M. T. Sebastian, "Evaluation of LSCO Electrodes for Sensor Protection Devices," Material Research Society Symposium Proceedings, Materials Research Society, Jan 2000.
The definitive version is available at https://doi.org/10.1557/PROC-623-365
Mechanical and Aerospace Engineering
United States. Defense Advanced Research Projects Agency
United States. Department of Energy
Article - Conference proceedings
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