Vision Based Iterative Learning Control of a MEMS Micropositioning Stage with Intersample Estimation and Adaptive Model Correction
Abstract
In this work the use of an Iterative Learning Control (ILC) algorithm to precisely control a highly nonlinear Micro-Electro-Mechanical (MEMS) micropositioning stage is demonstrated. Vision-based feedback with low sampling rate is augmented with estimates from a Kalman Filter to generate a high sampling rate estimate of the output. Nonlinearities in the system are accounted for using a linear parameter varying model based on experimental results. An automatic model correction technique based on measurement residual is also presented that increases the final estimation accuracy by over 70 percent. The effectiveness of the approach is demonstrated by tracking a 4 Hz sinusoid using 10 Hz camera feedback with a resulting RMS error of 0.25 micrometers.
Recommended Citation
P. J. White and D. A. Bristow, "Vision Based Iterative Learning Control of a MEMS Micropositioning Stage with Intersample Estimation and Adaptive Model Correction," Proceedings of the 2011 American Control Conference, Institute of Electrical and Electronics Engineers (IEEE), Jan 2011.
Meeting Name
American Control Conference, 2011
Department(s)
Mechanical and Aerospace Engineering
Keywords and Phrases
Kalman Filters; Adaptive Control; Cameras; Computer Vision; Control Nonlinearities; Feedback; Iterative Methods; Learning (Artificial Intelligence); Micromechanical Devices; Micropositioning
Document Type
Article - Conference proceedings
Document Version
Citation
File Type
text
Language(s)
English
Rights
© 2011 Institute of Electrical and Electronics Engineers (IEEE), All rights reserved.
Publication Date
01 Jan 2011
