Fabrication of Optical Microlenses in Glass Using a Femtosecond Laser for LBA-On-A-Chip Applications
We describe the fabrication of microoptical cylindrical and hemispherical lenses vertically embedded in a photosensitive Foturan glass by femtosecond (fs) laser three-dimensional (3D) micromachining. The process is mainly composed of four steps: (1) fs laser scanning in the photosensitive glass to form curved surfaces (spherical and/or cylindrical); (2) postannealing of the sample for modification of the exposed areas; (3) chemical etching of the sample for selective removal of the modified areas; and (4) second postannealing for smoothening the surfaces of the tiny lenses. We examine the focusing ability of the microoptical lenses using a He-Ne laser beam, showing great potential of using these microoptical lenses in lab-on-a-chip applications.
Y. Cheng and H. Tsai, "Fabrication of Optical Microlenses in Glass Using a Femtosecond Laser for LBA-On-A-Chip Applications," Proceedings of IMECE2006 2006 ASME International Mechanical Engineering Congress and Exposition, American Society of Mechanical Engineers (ASME), Nov 2006.
Mechanical and Aerospace Engineering
Keywords and Phrases
Glass Processing; Lense Fabrication
Article - Conference proceedings
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