Fabrication of Optical Microlenses in Glass Using a Femtosecond Laser for LBA-On-A-Chip Applications

Author

Y. Cheng
Hai-Lung Tsai, Missouri University of Science and TechnologyFollow

Abstract

We describe the fabrication of microoptical cylindrical and hemispherical lenses vertically embedded in a photosensitive Foturan glass by femtosecond (fs) laser three-dimensional (3D) micromachining. The process is mainly composed of four steps: (1) fs laser scanning in the photosensitive glass to form curved surfaces (spherical and/or cylindrical); (2) postannealing of the sample for modification of the exposed areas; (3) chemical etching of the sample for selective removal of the modified areas; and (4) second postannealing for smoothening the surfaces of the tiny lenses. We examine the focusing ability of the microoptical lenses using a He-Ne laser beam, showing great potential of using these microoptical lenses in lab-on-a-chip applications.

Recommended Citation

Y. Cheng and H. Tsai, "Fabrication of Optical Microlenses in Glass Using a Femtosecond Laser for LBA-On-A-Chip Applications," Proceedings of IMECE2006 2006 ASME International Mechanical Engineering Congress and Exposition, American Society of Mechanical Engineers (ASME), Nov 2006.

Department(s)

Mechanical and Aerospace Engineering

Keywords and Phrases

Glass Processing; Lense Fabrication

Document Type

Article - Conference proceedings

Document Version

Citation

File Type

text

Language(s)

English

Rights

© 2006 American Society of Mechanical Engineers (ASME), All rights reserved.

Publication Date

01 Nov 2006