Structural, Optical and Electronic Properties of P Doped P-Type ZnO Thin Film


P doped ZnO films were grown on quartz by radio frequency-magnetron sputtering method using a ZnO target mixed with 1.5 at% P2O 5 in the atmosphere of Ar and O2 mixing gas. The as-grown P doped ZnO film showed n-type conductivity, which was converted to p-type after 800 °C annealing in Ar gas. The P doped ZnO has a resistivity of 20.5 ? cm (p?2.0×1017 cm-3) and a Hall mobility of 2.1 cm2 V-1 s-1. XRD measurement indicated that both the as-grown and the annealed P doped ZnO films had a preferred (0 0 2) orientation. XPS study agreed with the model that the PZn2V Zn acceptor complex was responsible for the p-type conductivity as found in the annealed P-doped ZnO. Temperature-dependent photoluminescence (PL) spectrum showed that the dominant band is located at 3.312 eV, which was attributed to the free electronic radiative transition to neutral acceptor level (FA) in ZnO. The PZn2VZn acceptor complex level was estimated to be at EV=122 meV. © 2011 Elsevier B.V. All rights reserved.


Mechanical and Aerospace Engineering

Keywords and Phrases

P Doped; Photoluminescence; ZnO

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Article - Journal

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© 2011 Elsevier, All rights reserved.