Title

Deposition Technologies for Micromanufacturing: A Review

Abstract

This paper discusses the microdeposition technologies used in the fabrication of meso- and microscale structures. The ability to process a wide range of materials and the flexibility to build functional and geometrically complex structures in meso- and microscale gives the microdeposition method some advantages over micromachining or lithography methods investigated extensively in the past. In this paper, work on deposition technology is reviewed, including material, supply of material, powder flow rate, and manipulation of particles and microdeposition technologies. The advantages and disadvantages of each technology are summarized at the end of the paper.

Department(s)

Mechanical and Aerospace Engineering

Sponsor(s)

Air Force Research Laboratory (Wright-Patterson Air Force Base, Ohio)
National Science Foundation (U.S.)
United States. Army
University of Missouri Research Board

Keywords and Phrases

Chemical Vapour Deposition; Electrodeposition; Laser Deposition; Powder Technology

Library of Congress Subject Headings

Materials handling
Micromachining
Powders

Document Type

Article - Journal

Document Version

Citation

File Type

text

Language(s)

English

Rights

© 2004 American Society of Mechanical Engineers (ASME), All rights reserved.

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