Deposition Technologies for Micromanufacturing: A Review
Abstract
This paper discusses the microdeposition technologies used in the fabrication of meso- and microscale structures. The ability to process a wide range of materials and the flexibility to build functional and geometrically complex structures in meso- and microscale gives the microdeposition method some advantages over micromachining or lithography methods investigated extensively in the past. In this paper, work on deposition technology is reviewed, including material, supply of material, powder flow rate, and manipulation of particles and microdeposition technologies. The advantages and disadvantages of each technology are summarized at the end of the paper.
Recommended Citation
V. Kadekar et al., "Deposition Technologies for Micromanufacturing: A Review," Journal of Manufacturing Science and Engineering, American Society of Mechanical Engineers (ASME), Jan 2004.
The definitive version is available at https://doi.org/10.1115/1.1811118
Department(s)
Mechanical and Aerospace Engineering
Sponsor(s)
Air Force Research Laboratory (Wright-Patterson Air Force Base, Ohio)
National Science Foundation (U.S.)
United States. Army
University of Missouri Research Board
Keywords and Phrases
Chemical Vapour Deposition; Electrodeposition; Laser Deposition; Powder Technology; Materials handling; Micromachining; Powders
International Standard Serial Number (ISSN)
1087-1357
Document Type
Article - Journal
Document Version
Citation
File Type
text
Language(s)
English
Rights
© 2004 American Society of Mechanical Engineers (ASME), All rights reserved.
Publication Date
01 Jan 2004
