Title

Fabrication of 3D Microoptical Lenses in Photosensitive Glass Using Femtosecond Laser Micromachining

Abstract

We describe the fabrication of microoptical cylindrical and hemispherical lenses vertically embedded in a photosensitive Foturan glass by femtosecond (fs) laser three-dimensional (3D) micromachining. The process is mainly composed of four steps: (1) fs laser scanning in the photosensitive glass to form curved surfaces (spherical and/or cylindrical); (2) postannealing of the sample for modification of the exposed areas; (3) chemical etching of the sample for selective removal of the modified areas; and (4) a second postannealing for smoothening the surfaces of the tiny lenses. We examine the focusing ability of the microoptical lenses using a He-Ne laser beam, showing the great potential of using these microoptical lenses in lab-on-a-chip applications.

Department(s)

Mechanical and Aerospace Engineering

Sponsor(s)

Air Force Research Laboratory (Wright-Patterson Air Force Base, Ohio)
National Science Foundation (U.S.)

Keywords and Phrases

Foturan Glass; Curved Surfaces; Hemispherical Lenses; Microoptical Cylindrical

Library of Congress Subject Headings

Glass, Photosensitive

Document Type

Article - Journal

Document Version

Citation

File Type

text

Language(s)

English

Rights

© 2006 Springer, All rights reserved.


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