Digital Resonance Tuning of High-Q/Vm Silicon Photonic Crystal Nanocavities by Atomic Layer Deposition
We propose and demonstrate the digital resonance tuning of high-Q/V m silicon photonic crystal nanocavities using self-limiting atomic layer deposition. Control of resonances of 122 ±18 pm per hafnium oxide atomic layer is achieved. © 2008 Optical Society of America.
C. J. Chen et al., "Digital Resonance Tuning of High-Q/Vm Silicon Photonic Crystal Nanocavities by Atomic Layer Deposition," Applied Physics Letters, American Institute of Physics (AIP), Jan 2008.
The definitive version is available at https://doi.org/10.1063/1.2800312
Mechanical and Aerospace Engineering
Article - Conference proceedings
© 2008 American Institute of Physics (AIP), All rights reserved.