Digital Resonance Tuning of High-Q/Vm Silicon Photonic Crystal Nanocavities by Atomic Layer Deposition

Author

C. J. Chen
Xiaodong Yang, Missouri University of Science and TechnologyFollow
C. A. Husko
C. W. Wong

Abstract

We propose and demonstrate the digital resonance tuning of high-Q/V m silicon photonic crystal nanocavities using self-limiting atomic layer deposition. Control of resonances of 122 ±18 pm per hafnium oxide atomic layer is achieved. © 2008 Optical Society of America.

Recommended Citation

C. J. Chen et al., "Digital Resonance Tuning of High-Q/Vm Silicon Photonic Crystal Nanocavities by Atomic Layer Deposition," Applied Physics Letters, American Institute of Physics (AIP), Jan 2008.

The definitive version is available at https://doi.org/10.1063/1.2800312

Department(s)

Mechanical and Aerospace Engineering

Document Type

Article - Conference proceedings

Document Version

Citation

File Type

text

Language(s)

English

Rights

© 2008 American Institute of Physics (AIP), All rights reserved.

Publication Date

01 Jan 2008