Title

Digital Resonance Tuning of High-Q/Vm Silicon Photonic Crystal Nanocavities by Atomic Layer Deposition

Abstract

We propose and demonstrate the digital resonance tuning of high-Q/V m silicon photonic crystal nanocavities using self-limiting atomic layer deposition. Control of resonances of 122 ±18 pm per hafnium oxide atomic layer is achieved. © 2008 Optical Society of America.

Department(s)

Mechanical and Aerospace Engineering

Document Type

Article - Conference proceedings

Document Version

Citation

File Type

text

Language(s)

English

Rights

© 2008 American Institute of Physics (AIP), All rights reserved.


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