Investigation of PZT//LSCO//Pt//Aerogel Thin Film Composites for Uncooled Pyroelectric IR Detectors

Abstract

A monolithic thin film structure for uncooled pyroelectric infrared detector arrays was developed to integrate thermally isolated Pb(Zr,Ti)0 3-based thin films on silicon, with a low thermal conductivity, aerogel thin film interlayer. Aerogel thin films of 0.4-1.21am thickness and 70-85% porosity were deposited on silicon substrates by dip coating to form a thermal isolation layer. 200-400nm thick Pb(Zr0.4Ti0 6)03 films deposited on (La,Sr)CoO3[LSCO]//Pt electrodes atop these aerogel films displayed a remanent polarization Pr = 284 C/cm^2 , pyroelectric coefficient p = 30 nC/cm^2K, and calculated noise equivalent temperature difference NETD = 0.07°C. Processing of Pb(Zr,Ti)0 3 thin films atop the aerogel interlayer structure required modifications to deposition and heat treatment methods to minimize tensile stress accumulation. Effects of thermal processing and thin film stress state on ferroelectric properties are also reported.

Department(s)

Materials Science and Engineering

Document Type

Article - Conference proceedings

Document Version

Citation

File Type

text

Language(s)

English

Rights

© 1998 Materials Research Society, All rights reserved.

Publication Date

01 Aug 1998

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