Microstructural Characterization of Sputter Deposited BaTiO₃/Ni/BaTiO₃/Ni/BaTiO₃ Multi-Layer Thin Films on SiO₂/Si Wafers

Author

M. Zhang
J. N. Reck
F. Scott Miller, Missouri University of Science and TechnologyFollow
Matthew O'Keefe, Missouri University of Science and TechnologyFollow

Recommended Citation

M. Zhang et al., "Microstructural Characterization of Sputter Deposited BaTiO₃/Ni/BaTiO₃/Ni/BaTiO₃ Multi-Layer Thin Films on SiO₂/Si Wafers," Microscopy and Microanalysis, vol. 15, no. SUPPL. 2, pp. 1224 - 1225, Cambridge University Press, Jul 2009.

The definitive version is available at https://doi.org/10.1017/S143192760909477X

Meeting Name

Microscopy and Microanalysis 2009 (2009: Jul. 26-30, Richmond, VA)

Department(s)

Materials Science and Engineering

International Standard Serial Number (ISSN)

1431-9276; 1435-8115

Document Type

Article - Conference proceedings

Document Version

Citation

File Type

text

Language(s)

English

Rights

© 2009 Cambridge University Press , All rights reserved.

Publication Date

01 Jul 2009