Title

Thermochemical Nitridation of Microporous Silica Films in Ammonia

Abstract

Microporous silicon dioxide thin films were deposited on silicon substrates from a solution of tetraethoxysilane, ethanol, and water. These were converted to dense oxynitrides through a high-temperature reaction with ammonia. The ammonia treatments yielded amorphous, compositionally homogeneous films with overall nitrogen contents.

Department(s)

Materials Science and Engineering

Document Type

Article - Journal

Document Version

Citation

File Type

text

Language(s)

English

Rights

© 1987 American Chemical Society (ACS), All rights reserved.


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