Title

Compositional Profiling of Solution-deposited Lead Zirconate-titanate Thin Films by Radio-frequency Glow Discharge Atomic Emission Spectroscopy (rf-GD-AES)

Abstract

Depth-resolved elemental analysis of perovskite thin films based on lead zirconate-titanate (PZT) is performed by a relatively new technique; radio-frequency glow discharge atomic emission spectroscopy (rf-GD-AES). The technique provides in-depth composition information for the PZT layer, and underlying layers within the device architecture. Total film thicknesses of not, vert, similar1 μm are profiled in <30 s. Differences in pyrolysis conditions for two sol-gel produced films are easily identified based on the profiles of residual C, H, and O species. The technique is projected to be a valuable aid in the development of new electronic devices.

Department(s)

Materials Science and Engineering

Sponsor(s)

National Science Foundation (U.S.)

Keywords and Phrases

Compositional Depth Profiles; Lead Compounds; Lead Zirconate Titanate (PZT)

Document Type

Article - Conference proceedings

Document Version

Citation

File Type

text

Language(s)

English

Rights

© 2000 Elsevier, All rights reserved.

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