Control of oxygen and carbon impurities in Czochralski-grown silicon by altering the standard atmosphere and materials
Ownby, P. D.
Materials Science and Engineering
M.S. in Ceramic Engineering
University of Missouri--Rolla
ix, 91 pages
© 1989 Paul Graham McLaughlin, All rights reserved.
Thesis - Citation
Print OCLC #
Link to Catalog Record
Full-text not available: Request this publication directly from Missouri S&T Library or contact your local library.http://laurel.lso.missouri.edu/record=b2208657~S5
McLaughlin, Paul Graham, "Control of oxygen and carbon impurities in Czochralski-grown silicon by altering the standard atmosphere and materials" (1989). Masters Theses. 783.