Masters Theses


Weiya Fang


"The emerging demand for low cost, medium volume production and flexible micro-fabrication techniques has been advanced by the development of MEMS and limitations of the existing technique. As a promising building block for future MEMS and IC industry, nanoparticles are attracting more and more attention due to their interesting electronic, catalytic and optical properties, which can be finely tuned by varying their size. A novel process for the manufacturing of functional microstructures by modulated laser direct patterning and curing of nanoparticles is presented.

The first part of the thesis aims to understand the possibility and process of using modulated laser to sinter and pattern the nanoparticles. A thin layer of nanoparticles is deposited on the glass or silicon substrate through controlled dip-coating technology. Laser modulated by a digital micro-mirror array and focused is employed as the principle patterning technique for selective sintering/melting of NPs. A method to monitor and optimize thin film thickness is developed and discussed. Scanning electron microscopy and parameters studies on the effect of the laser initiating time during evaporation on the topology are reported.

In the second part, this maskless laser patterning combined with coaxial nanoparticle aerosol deposition is demonstrated. The silver nanoparticles (30nm) aerosolized by the eletrospray process are collimated by a coaxial nozzle and deposited on substrate. Laser pattern is applied simultaneously during the deposition, enabling the selective sintering of the deposited nanoparticles. During a subsequent washing step in ethanol solution, nanoparticles at unexposed regions are removed, leaving behind the desired pattern. The results of fabrication of microstructures are presented"--Abstract, page iv.


Liou, Frank W.

Committee Member(s)

Landers, Robert G.
Newkirk, Joseph William


Materials Science and Engineering

Degree Name

M.S. in Manufacturing Engineering


National Science Foundation (U.S.)
United States. Army Research Office
Air Force Research Laboratory (Wright-Patterson Air Force Base, Ohio)
Missouri University of Science and Technology. Intelligent Systems Center


Missouri University of Science and Technology

Publication Date


Journal article titles appearing in thesis/dissertation

  • Manufacturing of Micro Structure by Micromirror Direct Patterning and Laser Curing of Nanoparticles
  • Direct Microstructure Deposition by Laser Patterning Coaxial-fed Nanoparticles


vii, 30 pages

Note about bibliography

Includes bibliographical references.


© 2006 Weiya Fang, All rights reserved.

Document Type

Thesis - Restricted Access

File Type




Library of Congress Subject Headings

Microelectromechanical systems
Mirrors -- Microstructure

Thesis Number

T 10546

Print OCLC #


Electronic OCLC #


Link to Catalog Record

Electronic access to the full-text of this document is restricted to Missouri S&T users. Otherwise, request this publication directly from Missouri S&T Library or contact your local library.


Funded by the National Science Foundation Grant DMI-9871185