Masters Theses
Abstract
"Thin film techniques may be the key to future miniaturization of electrical equipment. The purpose of this thesis was to develop procedures for deposition of thin film resistors and to test these deposited resistors. Starting with a vacuum system, equipment was designed and built to hold and heat the substrate, monitor the substrate temperature and deposited resistance, and to evaporate the material to be deposited. Resistors were deposited and tested for resistance between resistors, capacitance between resistors, and resistance of resistors. A heat aging test was also used comparing resistors with and without a silicon monoxide coating"--Abstract, page ii.
Advisor(s)
Nolte, Roger E.
Committee Member(s)
Gerson, Robert, 1923-2013
Johnson, Charles A.
Skitek, G. G. (Gabriel G.)
Department(s)
Electrical and Computer Engineering
Degree Name
M.S. in Electrical Engineering
Publisher
University of Missouri at Rolla
Publication Date
1965
Pagination
v, 49 pages
Rights
© 1965 Rollie R. Herzog, All rights reserved.
Document Type
Thesis - Open Access
File Type
text
Language
English
Subject Headings
Thin films
Electric resistors, Film
Thesis Number
T 1774
Print OCLC #
5968777
Electronic OCLC #
834529355
Link to Catalog Record
Recommended Citation
Herzog, Rollie R., "Thin film resistor deposition" (1965). Masters Theses. 5351.
https://scholarsmine.mst.edu/masters_theses/5351
