Masters Theses

Abstract

"Thin film techniques may be the key to future miniaturization of electrical equipment. The purpose of this thesis was to develop procedures for deposition of thin film resistors and to test these deposited resistors. Starting with a vacuum system, equipment was designed and built to hold and heat the substrate, monitor the substrate temperature and deposited resistance, and to evaporate the material to be deposited. Resistors were deposited and tested for resistance between resistors, capacitance between resistors, and resistance of resistors. A heat aging test was also used comparing resistors with and without a silicon monoxide coating"--Abstract, page ii.

Advisor(s)

Nolte, Roger E.

Committee Member(s)

Gerson, Robert, 1923-2013
Johnson, Charles A.
Skitek, G. G. (Gabriel G.)

Department(s)

Electrical and Computer Engineering

Degree Name

M.S. in Electrical Engineering

Publisher

University of Missouri at Rolla

Publication Date

1965

Pagination

v, 49 pages

Note about bibliography

Includes bibliographical references (pages 84-86).

Rights

© 1965 Rollie R. Herzog, All rights reserved.

Document Type

Thesis - Open Access

File Type

text

Language

English

Library of Congress Subject Headings

Thin films
Electric resistors, Film

Thesis Number

T 1774

Print OCLC #

5968777

Electronic OCLC #

834529355

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