"A micron-precision micro-hole depth detection scheme has been developed which utilizes a confocal structure and a photomultiplier tube as a photodetector. This scheme is experimentally confirmed to posses an accuracy of greater than 95% for micro-holes on the order of one-hundred microns in diameter and tens of microns in depth and could be easily be integrated for the control of industrial and research oriented laser micro-machining process"--Abstract, page iii.
Xiao, Hai, Dr.
Alofs, Darryl J.
Mechanical and Aerospace Engineering
M.S. in Mechanical Engineering
Missouri University of Science and Technology
vi, 18 pages
© 2009 Rock Allen Powell, All rights reserved.
Thesis - Open Access
Library of Congress Subject Headings
Laser beam cutting
Lasers -- Industrial applications
Print OCLC #
Electronic OCLC #
Link to Catalog Recordhttp://laurel.lso.missouri.edu/record=b7318454~S5
Powell, Rock Allen, "On-line depth measurement of micro-scale laser drilled holes" (2009). Masters Theses. 4691.