The effect of oxygen partial pressure on oxygen and carbon incorporation in Czochralski grown single crystal silicon
Ownby, P. D.
Materials Science and Engineering
M.S. in Ceramic Engineering
University of Missouri--Rolla
ix, 80 pages
© 1986 Paul Shane Carter, All rights reserved.
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Carter, Paul Shane, "The effect of oxygen partial pressure on oxygen and carbon incorporation in Czochralski grown single crystal silicon" (1986). Masters Theses. 425.
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