Masters Theses

Abstract

"Float zone refining using simultaneous RF induction heating and electromagnetic levitation has proven to be the best technique for producing high purity silicon for the semiconductor industry.

A study of the power requirements for floating molten zones, of load to source impedance matching, and of considerations for RF heating coil design was conducted to determine possible methods of improving the technique. It is shown that the power requirements are within reason, that impedance matching can be improved by varying network parameters, and that certain vital items must be assured in the design of different RF heating coils.

It is believed that some of this research is directly applicable to the extension of the float zone refining technique to larger diameter silicon rods"--Abstract, page ii.

Advisor(s)

Van Doren, Thomas, 1940-

Committee Member(s)

Boone, Jack L.
Parks, William F.

Department(s)

Electrical and Computer Engineering

Degree Name

M.S. in Electrical Engineering

Publisher

University of Missouri--Rolla

Publication Date

1973

Pagination

vii, 65 pages

Note about bibliography

Includes bibliographical references (pages 26-28).

Rights

© 1973 John Allen Reynolds, All rights reserved.

Document Type

Thesis - Restricted Access

File Type

text

Language

English

Library of Congress Subject Headings

Silicon
Zone melting
Induction heating

Thesis Number

T 2927

Print OCLC #

6020288

Electronic OCLC #

914169074

Link to Catalog Record

Electronic access to the full-text of this document is restricted to Missouri S&T users. Otherwise, request this publication directly from Missouri S&T Library or contact your local library.

http://laurel.lso.missouri.edu/record=b1067003~S5

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