Pattern Planning and Optimization of Charged Particle Beam Scanning in Nanomanufacturing

Author

Ruwen Qin, Missouri University of Science and TechnologyFollow
Jing Fu
Zhaozheng Yin, Missouri University of Science and TechnologyFollow

Recommended Citation

R. Qin et al., "Pattern Planning and Optimization of Charged Particle Beam Scanning in Nanomanufacturing," Proceedings of the 15th International Conference on Mechatronics Technology (2011, Melbourne, Australia), Jan 2011.

Meeting Name

15th International Conference on Mechatronics Technology (ICMT'2011) (2011: Nov. 30-Dec. 2, Melbourne, Australia)

Department(s)

Engineering Management and Systems Engineering

Document Type

Article - Conference proceedings

Document Version

Citation

File Type

text

Language(s)

English

Publication Date

01 Jan 2011