Recommended Citation
C. Kim et al., "A New Approch to Low Drift Ta₂O₅ by pH Reactive Sputtering and Sol-Gel Method," Proceedings of the 8th International Conference on Solid-State Sensors and Actuators, 1995 and Eurosensors IX. Transducers '95. (1995, Stockholm, Sweden), Institute of Electrical and Electronics Engineers (IEEE), Jan 1995.
The definitive version is available at https://doi.org/10.1109/SENSOR.1995.721989
Meeting Name
8th International Conference on Solid-State Sensors and Actuators, 1995 and Eurosensors IX. Transducers '95. (1995, Stockholm, Sweden)
Department(s)
Electrical and Computer Engineering
Second Department
Chemical and Biochemical Engineering
Document Type
Article - Conference proceedings
Document Version
Final Version
File Type
text
Language(s)
English
Rights
© 1995 Institute of Electrical and Electronics Engineers (IEEE), All rights reserved.
Publication Date
01 Jan 1995
