Miniaturized Optical Fiber Fabry-Perot Interferometer Fabricated by Femtosecond Laser Irradiation and Selective Chemical Etching

Abstract

A U-shaped optical fiber inline microchannel was fabricated by femtosecond laser irradiation and subsequent selective chemical wet etching. A high quality micro-cavity embedded inside the channel was obtained to construct a Fabry-Perot interferometer (FPI). A fringe visibility of 20 dB in spectrum domain was achieved. High temperature survivability of this micro device was also demonstrated. The proposed assembly-free optical fiber inline interferometer is attractive for sensing applications in high-temperature harsh environments.

Meeting Name

SPIE MOEMS-MEMS (2014: Feb. 3-5, San Francisco, CA)

Department(s)

Electrical and Computer Engineering

Keywords and Phrases

Fabry-Perot interferometers; Optical fibers; Ultrashort pulses; Uranium; Chemical etching; Chemical wet etching; Fiber fabry-perot interferometers; Fringe visibilities; Harsh environment; High temperature; Sensing applications; Temperature sensing; Optical fiber fabrication; Fs laser irradiation; Selective chemical etching

International Standard Book Number (ISBN)

978-0819498878

International Standard Serial Number (ISSN)

0277-786X

Document Type

Article - Conference proceedings

Document Version

Citation

File Type

text

Language(s)

English

Rights

© 2014 SPIE, All rights reserved.

Publication Date

01 Feb 2014

Link to Full Text

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