Miniaturized Optical Fiber Fabry-Perot Interferometer Fabricated by Femtosecond Laser Irradiation and Selective Chemical Etching
A U-shaped optical fiber inline microchannel was fabricated by femtosecond laser irradiation and subsequent selective chemical wet etching. A high quality micro-cavity embedded inside the channel was obtained to construct a Fabry-Perot interferometer (FPI). A fringe visibility of 20 dB in spectrum domain was achieved. High temperature survivability of this micro device was also demonstrated. The proposed assembly-free optical fiber inline interferometer is attractive for sensing applications in high-temperature harsh environments.
L. Yuan et al., "Miniaturized Optical Fiber Fabry-Perot Interferometer Fabricated by Femtosecond Laser Irradiation and Selective Chemical Etching," Proceedings of SPIE, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VII, vol. 8974, SPIE, Feb 2014.
The definitive version is available at https://doi.org/10.1117/12.2038824
SPIE MOEMS-MEMS (2014: Feb. 3-5, San Francisco, CA)
Electrical and Computer Engineering
Keywords and Phrases
Fabry-Perot interferometers; Optical fibers; Ultrashort pulses; Uranium; Chemical etching; Chemical wet etching; Fiber fabry-perot interferometers; Fringe visibilities; Harsh environment; High temperature; Sensing applications; Temperature sensing; Optical fiber fabrication; Fs laser irradiation; Selective chemical etching
International Standard Book Number (ISBN)
International Standard Serial Number (ISSN)
Article - Conference proceedings
© 2014 SPIE, All rights reserved.