Abstract

An apparatus for inspecting a sample for defects includes a signal generator for generating a signal and a device for splitting the signal into two separate signals which have substantially equal phase and magnitude. A sensor radiates the two signals on the sample and receives the two signals reflected from the sample. A device is provided for determining a difference between the two signals reflected from the sample without unwanted influence of variations of distance between the sensor and sample, and reflections from nearby sample edges and boundaries. A defect is determined to exist when a difference is found between the two reflected signals.

Department(s)

Electrical and Computer Engineering

Patent Application Number

10/920,723

Patent Number

US 7,190,177 B2

Document Type

Patent

Document Version

Final Version

File Type

text

Language(s)

English

Rights

2007 © The Curators of the University of Missouri, All rights reserved.

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