An in situ self-diagnostic technique for a dissolved oxygen microsensor is proposed in an effort to devise an intelligent microsensor system with an integrated electro-chemical actuation electrode. With a built-in platinum microelectrode that surrounds the microsensor, two kinds of microenvironments (oxygen-saturated or oxygen-depleted phases) can be created by water electrolysis depending on the polarity. The functionality of the microsensor can be checked during these microenvironment phases. The polarographic oxygen microsensor is fabricated on a flexible polyimide substrate (Kapton/sup ©/) and the influences of electrochemical and hydrodynamic conditions on the sensor responses have been investigated.

Meeting Name

IEEE Sensors, 2003


Electrical and Computer Engineering

Second Department

Chemical and Biochemical Engineering

Keywords and Phrases

O2; Built-In Electrochemical Microactuator; Chemical Sensors; Electrochemical Interferences; Flexible Polyimide Substrate; Hydrodynamic Interferences; Intelligent Microsensor System; Microactuators; Microsensors; Oxygen Microsensor; Oxygen-Depleted Phases; Oxygen-Saturated Phases; Polarity; Water Electrolysis

Document Type

Article - Conference proceedings

Document Version

Final Version

File Type





© 2003 Institute of Electrical and Electronics Engineers (IEEE), All rights reserved.

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