A fully integrated pH sensor with a built-in reference electrode is proposed. An iridium oxide microelectrode and a pH-insensitive field-effect transistor are used as a pH sensor and a reference electrode, respectively. The sensitivity of the proposed device matches well with the estimated value to within 0.3 mV/pH deviation.
Y. Kim et al., "Configuration for Micro pH Sensor," Electronics Letters, Institute of Electrical and Electronics Engineers (IEEE), Oct 2003.
The definitive version is available at http://dx.doi.org/10.1049/el:20030977
Electrical and Computer Engineering
Chemical and Biochemical Engineering
Keywords and Phrases
Built-In Reference Electrode; Micro PH Sensor; PH-Insensitive Field-Effect Transistor; Sensitivity; Microelectrodes
Article - Journal
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