Abstract
A new principle of an amperometric actuation technique was incorporated in the ISFET glucose sensor. The ISFET is fabricated by the CMOS process and the platinum working electrode is deposited by the lift-off process. A sensor with a specially designed ladder type working electrode exhibits improved operation in response time, response magnitude and detection range. An expectation concerning the reduction of sensor size is also discussed.
Recommended Citation
C. Kim et al., "Miniaturized ISFET Glucose Sensor Including a New Structure Actuation System," Proceedings of the 1997 International Conference on Solid State Sensors and Actuators, 1997, Institute of Electrical and Electronics Engineers (IEEE), Jan 1997.
The definitive version is available at https://doi.org/10.1109/SENSOR.1997.635250
Meeting Name
1997 International Conference on Solid State Sensors and Actuators, 1997
Department(s)
Electrical and Computer Engineering
Second Department
Chemical and Biochemical Engineering
Keywords and Phrases
CMOS Process; ISFET Glucose Sensor; Pt; Amperometric Actuation Technique; Biosensors; Chemical Sensors; Detection Range; Ion Sensitive Field Effect Transistors; Ladder Type Working Electrode; Lift-Off Process; Microactuators; Microelectrodes; Patient Monitoring; Response Magnitude; Response Time; Sensor Size; Structure Actuation System; Working Electrode
Document Type
Article - Conference proceedings
Document Version
Final Version
File Type
text
Language(s)
English
Rights
© 1997 Institute of Electrical and Electronics Engineers (IEEE), All rights reserved.
Publication Date
01 Jan 1997
