Doctoral Dissertations

Title

The design of silicon-based polyimide as a submicron resolution directly imagable electron-beam resist

Alternative Title

Design of silicon based polyimide as a submicron resolution directly imagable electron beam resist

Department(s)

Chemistry

Degree Name

Ph. D. in Chemistry

Publisher

University of Missouri--Rolla

Publication Date

Spring 1989

Pagination

xii, 157 pages

Rights

© 1989 Benjamin Chung-Peng Ho, All rights reserved.

Document Type

Dissertation - Citation

File Type

text

Language

English

Thesis Number

T 5865

Print OCLC #

21130130

Link to Catalog Record

Full-text not available: Request this publication directly from Missouri S&T Library or contact your local library.

http://laurel.lso.missouri.edu/record=b2225474~S5

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