"Electric actuated thin films are widely used in micro-electromechanical systems (MEMS) such as radio frequency switches (RF-switches), micro-pumps and valves, and electrostatic actuators. This dissertation will focus on the operation of a MEMS-RF-switch. In a typical MEMS-RF-switch, a mechanically suspended 1-D rectangular or 2-D axisymmetric thin film is pulled by an electrostatic voltage (V₀) applied to an electrode-pad directly underneath. When V₀ exceeds a certain "pull-in" threshold, V₀*, the thin film makes direct contact with the pad so that either an "on" or "off" signal is induced, and when the voltage is removed, the thin film resumes its original undeformed configuration. To understand the device operation and to optimize the design parameters (e.g., dimension of the thin film), it is necessary to construct a rigorous elastic model for the electromechanical interaction"--Introduction, page 1.
Miller, B. A.
Rahaman, M. N., 1950-
Dharani, Lokeswarappa R.
Mechanical and Aerospace Engineering
Ph. D. in Mechanical Engineering
National Science Foundation (U.S.)
University of Missouri--Rolla
Journal article titles appearing in thesis/dissertation
- "Pull-in" of a pre-stressed thin film by an electrostatic potential: a 1-D rectangular bridge
- "Pull-in" of a pre-stressed thin film by an electrostatic potential: a 2-D axisymmetric plate
- Analysis of 1-D and 2-D thin film "pull-in" phenomena under the influence of an electrostatic potential
x, 98 pages
© 2007 Gang Duan, All rights reserved.
Dissertation - Open Access
Library of Congress Subject Headings
Print OCLC #
Electronic OCLC #
Link to Catalog Record
Duan, Gang, "Mechanical integrity and behavior of thin films and their applications in MEMS" (2007). Doctoral Dissertations. 1883.