Doctoral Dissertations

Gang Duan

Abstract

"Electric actuated thin films are widely used in micro-electromechanical systems (MEMS) such as radio frequency switches (RF-switches), micro-pumps and valves, and electrostatic actuators. This dissertation will focus on the operation of a MEMS-RF-switch. In a typical MEMS-RF-switch, a mechanically suspended 1-D rectangular or 2-D axisymmetric thin film is pulled by an electrostatic voltage (V₀) applied to an electrode-pad directly underneath. When V₀ exceeds a certain "pull-in" threshold, V₀*, the thin film makes direct contact with the pad so that either an "on" or "off" signal is induced, and when the voltage is removed, the thin film resumes its original undeformed configuration. To understand the device operation and to optimize the design parameters (e.g., dimension of the thin film), it is necessary to construct a rigorous elastic model for the electromechanical interaction"--Introduction, page 1.

Advisor(s)

Wan, Kai-tak

Committee Member(s)

Miller, B. A.
Chandrashekhara, K.
Rahaman, M. N., 1950-
Dharani, Lokeswarappa R.

Department(s)

Mechanical and Aerospace Engineering

Degree Name

Ph. D. in Mechanical Engineering

Sponsor(s)

National Science Foundation (U.S.)

Publisher

University of Missouri--Rolla

Publication Date

Fall 2007

Journal article titles appearing in thesis/dissertation

  • "Pull-in" of a pre-stressed thin film by an electrostatic potential: a 1-D rectangular bridge
  • "Pull-in" of a pre-stressed thin film by an electrostatic potential: a 2-D axisymmetric plate
  • Analysis of 1-D and 2-D thin film "pull-in" phenomena under the influence of an electrostatic potential

Pagination

x, 98 pages

Note about bibliography

Includes bibliographical references.

Rights

© 2007 Gang Duan, All rights reserved.

Document Type

Dissertation - Open Access

File Type

text

Language

English

Subject Headings

Electric switchgear
Microelectromechanical systems
Thin films

Thesis Number

T 9217

Print OCLC #

233182181

Electronic OCLC #

224049020

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