Online Monitoring of Nanoparticle Contamination in Reactive Gases
Numerous manufacturing processes require extremely low levels of nanoparticulate contamination to ensure product quality. While modern filters efficiently remove nanoparticles, online monitoring of the cleanliness of possibly reactive process gases is frequently necessary for quality control purposes. For most manufacturing processes, product quality depends on the concentration of particles above a specific threshold size. This paper will describe how to design an online nanoparticle monitoring system (NMS) for reactive (and inert) process gases from commercially available components, and will discuss how to adapt this system to varying process requirements, such as particle threshold size, and type and pressure of process gas. This paper will also describe a method to determine experimentally the performance of an NMS to ensure quality control.
O. Schmid et al., "Online Monitoring of Nanoparticle Contamination in Reactive Gases," Journal of the IEST, vol. 47, no. 1, pp. 111-115, Institute of Environmental Sciences and Technology, Sep 2004.
The definitive version is available at https://doi.org/10.17764/jiet.47.1.yt2052u20293773w
Keywords and Phrases
Condensation Nucleus Counters (CNC); Nanoparticle Monitoring Systems (NMS); Pressure Reduction Devices; Reactive Gases; Transport Lines; Aerosols; Condition Monitoring; Contamination; Detectors; Gas Absorption; Online Systems; Optimization; Product Design; Quality Control; Nanostructured Materials
International Standard Serial Number (ISSN)
Article - Journal
© 2004 Institute of Environmental Sciences and Technology, All rights reserved.