Thin Metal Films Formed in a Glow Discharge
McCafferty, E. and Clayton, C. R. and Oudar, J.
The synthesis of thin, contiguous, mirror-like metal films is effected by introducing selected organometal vapors into a glow discharge. The films are amorphous or crystalline depending upon the kinetic parameters employed and the presence of impurities, namely carbon and oxygen. As surface coatings, these metal films are promising as primers, corrosion and water vapor barriers, battery electrodes, etc. Characterization techniques, including ESCA and Auger spectroscopies are described.
W. J. James, "Thin Metal Films Formed in a Glow Discharge," Proceedings - The Electrochemical Society, The Electrochemical Society (ECS), Jan 1984.
Proceedings - The Electrochemical Society (1984, Washington, DC, USA)
Article - Conference proceedings
© 1984 The Electrochemical Society (ECS), All rights reserved.