Preparation of Amorphous Iron-containing and Crystalline Iron Oxide Films by Glow Discharge and Their Properties
Reflective, pinhole-free, iron-containing films were obtained by introducing iron pentacarbonyl vapors, Fe(CO) 5, into an inductively coupled r.f. glow discharge reactor. The films were amorphous with a particle size less than 0.1 μm based on the results of X-ray diffraction patterns and scanning electron micrographs. The chemical, electrical, and structural properties of these films depend upon the temperature of the deposition. The films exhibit the α-Fe phase after being annealed. The adhesive strength between the films and the aluminum substrates normally exceeds 4000 lbf in -2. Fe 3O 4 films with a preferred orientation (400) were successfully prepared by introducing either oxygen or carbon dioxide with iron pentacarbonyl into the glow discharge reactor at temperatures above 200°C. The influence of the CO 2 flow rate on the compositions of the Fe 3O 4 films was studied as was the relationship between composition and sheet conductivities. © 1990.
J. L. Li et al., "Preparation of Amorphous Iron-containing and Crystalline Iron Oxide Films by Glow Discharge and Their Properties," Materials Science and Engineering B, Elsevier, Jan 1990.
The definitive version is available at https://doi.org/10.1016/0921-5107(90)90003-T
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