Polymerization of Para-xylylene Derivatives VI

Alternative Title

Morphology of parylene N and parylene C films investigated by gas transport characteristics


The first part of this series concerns primarily the deposition kinetics of Parylene N and Parylene C. the influence on the film growth rate of factors such as substrate temperature, dimer sublimation rate, and pressure of inert gas added during the synthesis was of interest. Parts II and III reported the studies of thermal effects taking place during the deposition of polymers at different substrate temperatures. the information relevant to the present study was reported in Parts IV and V, which dealt with the effects on the morphology, crystalline structure, and crystallinity of Parylene N and Parylene C. Permeability characteristics described in this paper are intended to elucidate the rather unusual polymerization/deposition mechanisms. Such an efficient polymer deposition process in vacuum can be viewed as vacuum deposition polymerization in which the deposition process is the main mode of growth mechanism, and polymerization and deposition become an undividable one step process explained by a “rapid step-growth polymerization”. It was found that the mean pore size and the effective porosity are related to the morphology of the synthesized film.



Document Type

Article - Journal

Document Version


File Type





© 1990 Wiley-Blackwell, All rights reserved.