Title

Polymerization of Para-xylylene Derivatives (parylene Polymerization) III

Alternative Title

Heat effects during deposition of parylene N at different temperatures

Abstract

Thermal effects accompanying the vacuum deposition of poly-para-xylene (Parylene N) at different temperatures have been studied by following the changes in the temperature of the substrate. Two distinct exothermic effects were observed; one discrete, resulting in sharp exothermic spikes and the other continuous, resulting in the shift of the baseline. the spike effect, attributed to the solid-state polymerization of para-xylylene, is observed at the low-temperature range, the upper limit of which moves higher for higher deposition rates. the shift of a baseline as a function of deposition temperature exhibits two maxima, one independent of deposition rate and the second moving toward higher temperatures (that is, toward the first maximum) for higher deposition rates.

Department(s)

Chemistry

Document Type

Article - Journal

Document Version

Citation

File Type

text

Language(s)

English

Rights

© 1986 Wiley-Blackwell, All rights reserved.


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