Polymerization of Para-xylylene Derivatives (parylene Polymerization) III
Heat effects during deposition of parylene N at different temperatures
Thermal effects accompanying the vacuum deposition of poly-para-xylene (Parylene N) at different temperatures have been studied by following the changes in the temperature of the substrate. Two distinct exothermic effects were observed; one discrete, resulting in sharp exothermic spikes and the other continuous, resulting in the shift of the baseline. the spike effect, attributed to the solid-state polymerization of para-xylylene, is observed at the low-temperature range, the upper limit of which moves higher for higher deposition rates. the shift of a baseline as a function of deposition temperature exhibits two maxima, one independent of deposition rate and the second moving toward higher temperatures (that is, toward the first maximum) for higher deposition rates.
M. Gazicki et al., "Polymerization of Para-xylylene Derivatives (parylene Polymerization) III," Journal of Polymer Science, Part A: Polymer Chemistry, Wiley-Blackwell, Jan 1986.
The definitive version is available at https://doi.org/10.1002/pola.1986.080240203
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© 1986 Wiley-Blackwell, All rights reserved.