Polymerization of Para-xylylene Derivatives (parylene Polymerization) II
Heat effects during deposition of parylene C at different temperatures
Thermal effects accompanying vacuum deposition of poly(chloro-para-xylylene) in the temperature range between minus 196 and 0 degree C have been studied using two separate methods. One is based on the recording of the rate of evaporation of liquid nitrogen and it is used for the deposition at minus 196 degree C, and the second involves the recording of changes in the substrate temperature and is used for the deposition in the range of minus 162 to 0 degree C. These methods enable us to observe two distinct effects: fast (discrete), resulting in the appearance of sharp, exothermic spikes; and slow (continuous), resulting in the shift of the baseline. the shift of the baseline exhibits a well-defined maximum at about minus 65 degree C and this temperature is attributed to the melting pointn of the monomer. the fast process always occurs below this temperature and is explained as a solid state, chain addition polymerization.
M. Gazicki et al., "Polymerization of Para-xylylene Derivatives (parylene Polymerization) II," Journal of Polymer Science, Part A: Polymer Chemistry, Wiley-Blackwell, Jan 1985.
The definitive version is available at https://doi.org/10.1002/pol.1985.170230815
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© 1985 Wiley-Blackwell, All rights reserved.