Abstract

A new class of optical oxygen sensor that can be photopatternable by traditional UV lithography is presented. They are fabricated using photopatternable spin-on silicone (polydimethylsiloxane, PDMS) with oxygen sensitive luminescent dyes. It has a good adhesion property and can be applied on glass or on photopolymer (SU-8) without any additional surface treatments. The optimum mixture composition for patternable oxygen sensitive membranes is investigated and its optical properties are characterized. Proof-of-concepts for two applications, intensity-based oxygen sensing with SU-8 based structure and self-calibration fluidic oxygen sensor, are described. These photopatternable optical membranes will find many applications wherever small patterns of oxygen sensitive membranes are required.

Department(s)

Chemical and Biochemical Engineering

Second Department

Electrical and Computer Engineering

Sponsor(s)

National Institute of Health (U.S.)
National Science Foundation (U.S.)

Keywords and Phrases

Fluidics; Ruthenium

Library of Congress Subject Headings

Oxygen
Porphyrins
Silicones

Document Type

Article - Journal

Document Version

Final Version

File Type

text

Language(s)

English

Rights

© 2009 Institute of Electrical and Electronics Engineers (IEEE), All rights reserved.

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